micro hotplate

常见例句

This paper reports a CMOS compatible tungsten micro-hotplate.
本文设计了一种与标准CMOS工艺兼容的钨微热板。
In this paper, a monolithic thermal vacuum sensor based on a micro-hotplate(MHP)and operating under constant bias voltage conditions was designed.
设计了一种工作在恒电压模式的、微热板结构的单片集成电阻真空传感器芯片。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.
针对微热板式微气压传感器的静态和动态性能测试，对传感器的真空测试环境进行了实时控制仿真。