dual damascene

基本解释

The invention provides a method for forming a groove and a dual damascene structure.
本发明提出一种形成沟槽及双镶嵌结构的方法。
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The invention can reduce the formation of depression on the side walls of the groove contained in the dual-damascene structure;
可减少形成于所述双镶嵌结构内包含的沟槽侧壁上的凹陷的产生；
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In this paper, we propose the investigation of the void in dual damascene process and the hole and trench with large aspect ratios between width and height.
本论文主要针对双层镶嵌制程所造成的孔隙及具有高深宽比的极窄和极深的通孔和沟槽所造成的影响加以探讨及研究。