slurry polishing

基本解释

Chemical mechanical polishing Rough surface Microscale flow Polishing slurry;
化学机械抛光；粗糙表面；微尺度流动；抛光液；
Laser inducement fluorescence (LIF) is used to study the effect of polishing parameters on slurry film thickness.
本文采用激光诱导荧光技术（LIF）来研究抛光参数对化学机械抛光加工区液膜厚度的影响。
The study indicates that the thickness of slurry layer increases with increasing polishing speed and the increasing trend decreases with increasing polishing rotational speed.
研究表明，抛光液膜厚度随着抛光速度的增加而增加，增加的趋势随抛光转速的提高而减缓。